KURODA's NANOMETRO FR series can measure the surface flatness and morphology of large disks with maximum diameters of 500mm to 1000mm. Suitable for the process management of wafer and CMP ceramic plates, the series is widely used in R&D and OQC management by CMP ceramic plate manufacturers and CMP equipment manufacturers.
○ The 1st industry standard in the world, which is widely applied by CMP ceramic disc and equipment manufacturers.
○ Disc diameter: Φ500--1000㎜ (Flatness).
○ High precision air floating mechanism.
○ Measurement accuracy: 0.4μm.
○ Optional evaluation method:
• Detail Concentric circle measurement
• General Axis Measuring
○ Varied analysis function, software can be customized based on customer requirements.
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KURODA NANOMETRO FR SERIES |
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|---|---|---|
| Measurement Diameter | φ500-1000㎜ |
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| Measurement accuracy | 0.4μm |
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| Repeatability | 0.05μm（σ） |
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| Resolution | 0.01μm |
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| Sensor | Electronic Micrometer |
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| Max Load Weight | 6０ｋｇ |
• Apply to CMP ceramic disc production process management and shipment inspection.
• Apply to CMP machine validation management.
• Apply to IQC inspection of CMP ceramic plates, and process management of surface morphology of CMP ceramic plates.
