◆ Size Nano Colloids Precisely and Quickly
○ 6 – 360 nm measurement range in under 5 minutes
○ Actual quantitative concentrations
○ Any particle, any shape, any composition, any distribution (including multimodal)
○ Great for CMP slurry, resin rinse, bio-pharma and filter characterization, monitoring and control
◆ Industry Recognition
○ C79-0113 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
○ C93-0217 Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water Systems
○ C98-1219 Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting Used in Semiconductor Manufacturing
◆ Integrated Software Platform - Kanolysis
○ Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax
○ Patent number 7,852,465 has been issued to Kanomax
○ Kanomax has applied for additional domestic and international patents for technology contained within the LNS System.
◆ 1 year warranty
○ Combines proven techniques (used by NIST, USA and AIST, Japan) for counting and sizing aerosol size distributions with a unique nebulizer technology to successfully measure particle size and number concentration in concentrated liquid suspensions.
○ Offers greater accuracy, better precision, and improved resolution in CMP slurry size-measurement results (used extensively in the semiconductor industry).
○ Straightforward data inversion without complex inversion routines, assumptions or size calibrations. The software can identify each particle-size mode and assigns a cumulative size at 10%, 50% and 90% of the distribution. Changes in the size of a specific mode can be easily monitored with these size statistics.
○ Does not make assumptions about the shape of the particle size distributions and measures actual number concentrations not relative particle concentrations.
○ In SEMI C92 the LNS is used to determine the quality of ion exchange resin. In SEMI C79 the LNS evaluates the efficiency of sub-15 nanometer filters used in ultrapure water distribution systems. No other particle instrumentation is capable of making the required measurements described by SEMI C79.
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KFMT/ Liquid NanoParticle Sizer (LNS) System Model 9310 |
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Particle size range | 6-360 nm |
Particle size resolution | 64 channels per decade of size |
Measurement time | <5 minutes |
Inspection volume rate | 0.2-1.0 μL/min |
Total liquid sample flow rate (online) | 50-280 mL/min |
bulizer flow rate | 0.5-3.0 mL/min (direct injection) |
Dilution factor range | 50-20,000 |
Colloid concentration range (post dilution) | 3E7-3E11 number/mL |
Response time to concentration change | <90 seconds |
Inlet water pressure (online) | 140-300 kPa (20-45 psig) |
Compressed air flow rate/pressure | 2.5 std L/min CDA or Nitrogen 2.8 bar (50-60 psi) |
Wetted surfaces (before nebulization) | PFA, PTFE, sapphire, 316L stainless steel, PEEK |
CPC working fluid | n-butyl alcohol (butanol) |
I/O Communications | Ethernet, internal memory |
Power requirements | 100/115/220/240 VAC; 50-60 Hz |
Operating temperature | 10-35°C |
Operating humidity | 0-90% RH non-condensing |
Storage temperature | 5-35°C |
Dimensions | 9.5 × 8 × 36 inches (D/W/H) |
Software – computer operating system | Windows 10 |