◆Monitor UPW System Health and Stability
○ 50% detection efficiency at 10 nm
○ Real-time, on-line nano particle monitor
○ Counts particles of any shape, any refractive index, any composition
○ Great for monitoring organics, colloidal silica, resin beds, and other yield killers in UPW that traditional OPC’s miss
◆Industry Recognition
○ The STPC is used for compliance with SEMI C79 “Guide to Evaluate the Efficacy of Sub-15 nm Filters used in Ultrapure Water (UPW) Distribution Systems.”
○ The STPC is used for compliance with the SEMI C93 “Guide for Determining the Quality of Ion Exchanged Resin used in Polish Applications of Ultrapure Water (UPW) Systems.”
◆Patent Protected
○ Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax FMT.
○ Patent number 7,852,465 has been issued to Kanomax FMT.
○ Kanomax has applied for additional domestic and international patents for technology contained within the ScanningTPC.
◆ 1 year warranty
○ Monitors particles ≥10 nm in real-time.
○ Rapid response time to detect changes in particle contamination levels. The response is not dependent on particle refractive index or particle shape.
○ Option to specify particle sizes for continuous (non-scanning) monitoring.
○ Calibrated with Colloidal Silica (European Reference Materials traceable)
○ Portable and easy to set up. Robust with minimal maintenance requirements.
○ Simple to operate using the intuitive front-panel-display menus.
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KFMT/ Scanning Threshold Particle Counter STPC 9010 |
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Specifications Measurement range | 1E3 to 1E10 #/mL |
Inspection volume rate | 1 - 5 μL/min |
Threshold sizes | 10-20 nm user selectable in 5 nm increments (50% detection efficiency) |
Number of size channels | 1-3 (user configurable) |
Dead time between channel adjustment | 2-5 minutes |
Total flow rate | 50-280 mL/min |
Response time to concentration change | < 30 seconds |
Inlet water pressure (online) | 200-500 kPa (30-70 psig) |
Compressed air/nitrogen flow rate/pressure | 2.5 std L/min CDA or Nitrogen, 340-410 kPa (50-60 psi) |
Compressed air quality standards | ANSI IS08573-1:2010 Class 2 for compressed air |
Maximum UPW nonvolatile residue | 200 ppt at 10 nm threshold, 1 ppb at 20 nm |
Wetted surface materials before nebulization | PFA, PTFE, PEEK, sapphire |
Detector working fluid | Reagent-grade n-Butyl alcohol |
Working fluid consumption rate | Approximately 150 mL/day (bottle lasts for one week) |
Ambient temperature range | 15-35°C (59-95°F) |
Ambient relative humidity range | 0-85% non condensing |
Maximum water temperature | 50°C (122°F) |
Dimensions (W × D × H) | 42 × 43 × 27 (43 with bottle) cms, 16.7 × 16.8 × 10.5 (16.8 with bottle) inches |
Weight | 16.1 Kg (35.5 lbs) |
Power (Nebulizer) | Universal 100-240 VAC, 50/60 Hz, 90 W max |
Power (Nebulizer) | Universal 100-240 VAC, 50/60 Hz, 210 W max |
Output | RJ-45 for Modbus, USB FlashDrive |
Internal storage | Micro SD |
Ultrapure water inlet | ¼ inch PFA Flaretek® |
Waste outlet | ¼ inch SS Swagelok® |
Compressed air inlet | ¼ inch SS Swagelok® |
Port Display | 7 inch TFT Color, touch panel |
Shipping drain | Colder brand quick disconnect |