• Picarro/ AMC Analyzer System SAM-S

    Picarro/ AMC Analyzer System SAM-S


    Applications requiring trace gas analysis include environmental monitoring, emissions monitoring, greener automotive engine development, semiconductor fabs, cleanroom technology and bio-pharmaceutical process monitoring. All these applications can benefit from a turnkey analyzer that provides real-time speed, high precision and sensitivity to parts per billion and beyond. And, from a practical standpoint, the ideal trace gas analyzer requires minimal or no sample preparation or dilution, and is contained in a rugged, compact platform with low operating costs. Specifically, the latter means no need for a trained technician and, optimally, the capability for remote, unmanned operation.
    CRDS is the first trace-gas analysis instrumentation to meet all these needs, and it can even provide isotope ratios for environmental and biomedical applications. Just as important, the same Picarro CRDS analyzers can be used as unmanned remote monitors, industrial process sensors, and reference laboratory instruments, greatly simplifying transfer of standards and protocols. And the extraordinary low drift of these instruments means they can operate for months without recalibration in most applications.

    • Features and Advantages
    • Specifications
    • Applications

    ◆ Characteristic


    ○ Superb sensitivity, precision & accuracy with virtually no drift

    ○ Fast, continuous, real-time measurements without interference

    ○ Large dynamic range with high linearity

    ○ Field and laboratory deployable with no consumables

    ○ Installed and operational in minutes

    ○ Rugged and insensitive to changes in ambient temperature, pressure or vibration

    ○ 1 year warranty


    ◆ Advantage


    ○ Response time (seconds instead of minutes)

    ○ Accuracy, Precision and LDL at PPT levels.

    ○ Stability : no calibration

    ○ Maintenance cycle: ( 6month,1year)

    ○ Preventative Maintenance @ very low price

    Performance

    Specifications

    SI 3401

    H2O

    HCI

    HF

    NH3

    Precision

    20 ppm + (8 x %H2O) (10 sec)

    10 ppm + (4 x %H2O) (100 sec)

    ≤75 ppt (10 sec),

    ≤25 ppt (100 sec)

    ≤40 ppt (10 sec),

    ≤15 ppt (100 sec)

    ≤300 ppt (10 sec),

    ≤100 ppt (100 sec)

    Lower Detectable Limit (100 sec., 3σ)

    30ppm

    75 ppt

    40 ppt

    300 ppt

    Method Detection Limit (per Semi C10-1109)

    40ppm

    250 ppt

    500 ppt

    500 ppt

    Linearity (per IEC 61207)

    ±1%

    ±1%

    ±1%

    ±1%

    Accuracy at span

    ±5% @ full scale

    ±5% @ full scale

    ±5% @ full scale

    ±5% @ full scale

    Accuracy at zero

    ±40 ppt

    ±50 ppt

    ±25 ppt

    ±150 ppt

    Instrument-to-Instrument Consistency

    ±5% @ full scale
    ±40 ppm @ zero

    ±5% @ full scale
    ±50 ppt @ zero

    ±5% @ full scale

    ±25 ppt @ zero

    ±5% @ full scale
    ±150 ppt @ zero

    Measurement Range

    0–40000 ppm

    0-2 ppm

    0 – 1 ppm

    0 – 10 ppm

    Measurement Interval*

    <9 seconds

    <5 seconds

    Sample Flow Rate

    ~2 slm

    Combined Response Times (T90/10 + T10/90) @ 20 ppb

    <20 sec (100 ppb challenge)

    <3 min

    Fall Times T90/10 @ 20 ppb

    <10 sec (100 ppb challenge)

    <1 min


    SI3401 Series System Specifications

    Measurement

    Technique CRDS

    Calibration Period Recommendation

    15 to 35°C (operating); -10 to 50°C (storage)

    Ambient Humidity

    <85% RH non-condensing

    Accessories Pump

     (external, included), keyboard (included), mouse (included), LCD monitor (optional)

    Outputs

    RS-232, Ethernet, USB

    Fittings

    1⁄4” Swagelok® PFA Fittings

    Dimensions Analyzer

    16.7” w × 8.4” h x 24.8” d (43 × 21.3 × 63 cm)

    Weight

    78 lbs. (35.4 kg) including pump

    Power Requirements

    100–240 VAC, 47–63 Hz (auto-sensing), <260 W start up (total): 110 W (analyzer), 120 W (pump) at steady state

    ◆ Applications



    • wafer fab manufacturing (Advanced Technologies)
    • Equipment Monitoring
    • FOUP Monitoring
    • OEM Manufacturer