○ FOSB can fit automatic machine
○ Load port switch according to SEMI standard size
○ OHT is easy to be flanged (optional)
○ Easy to use design
○ Ergonomic handling test handle
○ Can be turned on / off automatically or manually
○ FOSB can fit automatic machine
○ Load port switch according to SEMI standard size
○ OHT is easy to be flanged (optional)
○ Easy to use design
○ Ergonomic handling test handle
○ Can be turned on / off automatically or manually
|
3S FOSB |
---|---|
Capacity | 25 pieces |
Pitch(PITCH) | 10mm |
Dimensions | W387mm X D344.5mm X H328mm |
weight | 4.2kg (excluding wafers)- 7.2kg (including wafers),Weight depend on optional features |