○ Used when cleaning wafers in the factory process
○ 3S open cassette uses super engineering plastic
○ Carriers in wafer manufacturing plants
○ Excellent dimensional stability / precision / heat resistance / chemical resistance
○ Used when cleaning wafers in the factory process
○ 3S open cassette uses super engineering plastic
○ Carriers in wafer manufacturing plants
○ Excellent dimensional stability / precision / heat resistance / chemical resistance
|
3S Open Cassette |
---|---|
Capacity | 25 pieces |
Pitch (PITCH) | 10mm |
Dimensions | W332mm X D310mm X H301mm |
weight | 2.2kg (excluding wafers)-5.2kg (including wafer) ,Weight depend on optional features |