○ Available in 200mm, 300mm and 450mm
○ On-board camera： Reports x-y-z offset from the teaching wafer to a target inside the equipment so you can teach wafer transfer coordinates
○ TeachView: Displays real-time video and measurements of target features, logs offsets and user comments
○ TeachReview: Replays log file data for review and analysis
○ Teach Target: Allows teaching of circular features, 3mm-10mm diameter
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ATS |
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| Durable housing | Carbon fiber composite substrate |
| Lightweight | 160 grams (200mm), 235 grams (300mm), 600 grams (450mm) |
| Highly accurate | +/- 0.1mm (X and Y position): +/- 0.8mm (z position) |
| Working distance | 6.5mm to 45mm below the teaching wafer |
| Operating pressure | <10e-6 to 760 torr |
| Operating temperature | 20 to 70 degrees C |
| Battery-operation | >2 hrs. per charge, 8 hrs. typical |
| WaferSense Link | Bluetooth, 2.4 GHz, USB 1.1, dimensions 92mm x 58mm x 28mm |
| Operating Systems | Windows 7, XP, Vista |
| Product components | Teaching measurement device, charging clean case, carrying suitcase, USB communications,link module and application software |
| Calibration | Factory recalibration recommended annually |
