• Features and Advantages
    • Specifications
    • Applications

    ◆ Characteristic


    ○ MAU、FFU、RCU、Drycoil

    ○ Airflow (CMH) 3300 or 1350

    ○ Air Velocity (m/s) 2.5±10% or 1±10%

    ○ Initial Eff. >90% or<1ppb

    ○ Challenge gases H2S、DMS、CS2、NH3、Acids、VOC、O3

    ○ Our Best Service –Customized Solutions



    Customized Solutions

    ◆ Applications



    • wafer fab , FPD display manufacturing
    • gas monitoring
    • R&D institute
    • Big data center
    • Customized