• ALS

    ALS


    Quickly and accurately set the same level across tools for better process uniformity.
    Measure the inclination of cassettes, FOUPs, end effectors, aligner, load locks, transfer pins and process。chamber pedestals to fully characterize your production equipment.


    • Features and Advantages
    • Specifications
    • Applications

    ◆ Characteristic


    ○ Available in 200mm, 300mm and 450mm

    ○ ALS2V200C (light version with vertical)

    ○ LevelView and LevelReview software included

    ○ LevelView: Displays real-time visual feedback. Digital readout allows more precise adjustment

    ○ LevelReview: Replays log file data for review and analysis


    ALS2
    Durable housing Carbon fiber composite substrate
    Lightweight 150 grams (200mm), 240 grams (300mm), 600 grams (450mm)
    Horizontal accuracy +/-0.03 deg within +/- 7 deg from absolut
    Vertical accuracy +/-0.05deg within +/-50 deg from vertical
    Horizontal resolution +/-0.002deg within +/-14 deg
    Vertical resolution +/-0.01deg within+/- 50 deg
    Operating pressure <10e-6 to 760 torr
    Operating temperature 20 to 70 degrees C
    Battery-operation >4 hrs. per charge, 8 hrs. typical
    WaferSense Link Bluetooth, 2.4 GHz, USB 1.1, dimensions 92mm x 58mm x 28mm
    Operating Systems Windows 7, XP, Vista
    Product components Leveling measurement device, charging clean case, carrying suitcase, USB communications,link module and application software
    Calibration Factory recalibration recommended annually

    ◆ Applications



    • wafer fab , FPD display manufacturing
    • Mech
    • R&D institute