• AMS

    AMS


    Speed vibration, leveling and humidity measurements with all-in-one.
    Measuring Vibration & leveling device. Improve yields. Records data for easy comparison between past and present, as well as one tool to another, to reduce maintenance time and cycle time.


    • Features and Advantages
    • Specifications
    • Applications

    ◆ Characteristic


    ○ Available in 150mm, 200mm, 300mm, 450mm

    ○ MultiView and MultiReview software included

    ○ MultiView: Displays real-time visual feedback. Digital readout allows more precise adjustment

    ○ MultiReview: Replays log file data for review and analysis

    ○ Highly accurate Reports accelerations in three directions; x,y and z and RMS display allows quick, objective measurements


    AMS
    Durable housing Carbon fiber composite substrate
    Lightweight 150 grams (200mm), 240 grams (300mm), 600 grams (450mm)
    leveling accuracy +/-0.03 deg within +/- 7 deg (200 & 300mm) +/- 4 deg (450mm) from absolute
    Vertical accuracy +/-0.05deg within +/-50 deg from vertical
    Horizontal resolution +/-0.002deg within +/-14 deg.
    Vertical resolution +/-0.01deg within +/- 50 deg
    Operating range +/- 2 G
    Humidity accuracy +/- 2% RH
    Thin 3.5mm
    Operating pressure <10e-6 to 760 torr
    Operating temperature 20 to 70 degrees C
    Battery-operation >4 hrs. per charge, 8 hrs. typical
    WaferSense Link Bluetooth, 2.4 GHz, USB 1.1, dimensions 92mm x 58mm x 28mm
    Operating Systems Windows 7, XP, Vista
    Product components Vibration measurement device, charging clean case, carrying suitcase, USB communications,link module and application software
    Calibration Factory recalibration recommended annually

    ◆ Applications



    • Wafer fab , FPD display manufacturing
    • Mech
    • R&D institute