• APS

    Aps


    Lighter. Precision accuracy.
    The next generation of the APS improves equipment set-up and yields by wirelessly monitoring airborne particles in real-time.
    Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14μm within semiconductor process equipment and automated material handling systems.
    Easily identifies when and where the particles originate.


    • Features and Advantages
    • Specifications
    • Applications

    ◆ 特点


    ○ Available in 150mm, 200mm and 300mm

    ParticleView and ParticleReview software included.

    ○ ParticleView: Displays real-time numeric and visual feedback, cumulative or differential counting modes and density or frequency modes.

    ○ ParticleReview: Replays log file data for review and analysis.;

    ○ Measures particles greater than 0.14μm

    ○ Size channels: Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5,10 and30 μm bin sizes.


    Aps2-LP
    Durable housing Carbon fiber composite substrate
    Lightweight 150mm (124g); 200mm (140g); 300mm (200g) (± 7%)
    Airflow 0.07CFM (2.0 L/min)@ 1 atmosphere
    Operating pressure 0.4 to 1.6 atmosphere
    Operating temperature 15 deg C to 45 deg C non-condensing
    15 deg C to 45 deg C non-condensing >1 hour per charge. Inductive wireless charging and handsfree operatio
    WaferSense Link Bluetooth, Class 1, 2.4GHz
    Operating Systems Windows 7, 8, 10, XP, Vista
    Product components Particle measurement device, charging clean case, carrying suitcase, USB communications link module and application software
    Calibration Factory recalibration recommended annually

    ◆ Applications



    • Wafer fab , FPD display manufacturing
    • Gas monitoring
    • R&D institute