• AVS

    AVS


    Speed monitoring 3-axis acceleration andvibration, enabling yield improvements
    Records vibration data for easy comparison between past and present, as well as one tool to another, to reduce particles, maintenance time and cycle time.


    • Features and Advantages
    • Specifications
    • Applications

    ◆ Characteristic


    ○ Available in 200mm, 300mm and 450mm;

    ○ VibeView and VibeReview software included;

    ○ VibeView: Displays real-time visual feedback and can record data in a log file

    ○ ViewReview: Replays log file data for review and analysis

    ○ Highly accurate Reports accelerations in three directions; x,y and z and RMS display allows quick, objective measurements

    ○ Resolution: +/- 0.01 G


    AVS
    Durable housing Carbon fiber composite substrate
    Lightweight 150 grams (200mm), 240 grams (300mm), 600 grams (450mm)
    Operating range +/- 2 G
    Operating pressure <10e-6 to 760 torr
    Operating temperature 20 to 70 degrees C
    Battery-operation >4 hrs. per charge, 8 hrs. typical
    WaferSense Link Bluetooth, 2.4 GHz, USB 1.1, dimensions 92mm x 58mm x 28mm
    Operating Systems Windows 7, XP, Vista
    Product components Vibration measurement device, charging clean case, carrying suitcase, USB communications,link module and application software
    Calibration Factory recalibration recommended annually

    ◆ Applications



    • Wafer fab , FPD display manufacturing
    • Mech
    • R&D institute