• KFMT/ Nano Spotlight System Model 9410

    KFMT/ Nano Spotlight System Model 9410


    The Nano SpotLight System is the latest addition to Kanomax FMT’s growing list of innovative technologies.
    While the semiconductor industry has been able to count nanometer sized particles for decades it has struggled to identify the elemental composition of the particles. When a “particle event” affecting semiconductor yield occurs in a semiconductor manufacturing facility, knowing the composition of the contaminating particles can be crucial in identifying the source of the event and eliminating the problem. Traditional Scanning Electron Microscopy (SEM) methods of attempting to collect these particles on a 25mm filter requires a long sample collection time (usually of several weeks). But in situations like this speed is essential to minimize manufacturing disruption. The Nano SpotLight’s System typical collection time is only 24 hours.

    • Features and Advantages
    • Specifications
    • Applications

    ◆ Characteristic


    ○ High collection efficiency and extremely low cross contamination

    ○ Automated sampling procedure

    ○ SEM-ready samples (no more stub preparation)

    ○ 1 year warranty


    ◆ Advantage


    ○ Collect UPW Nano Particles In One Spot

    ○ Collects 5 nm and above

    ○ Bacteria, organics, colloidal silica, resin beads are extracted and collected

    ○ Collects particles in a << 1mm spot

    ○ Actionable insight in hours, not weeks

    ○ [SH]: bullets added to be consistent with the website.


    KFMT/ Nano Spotlight System Model 9410
    Particle size range 5 nm -2.5 μm
    Collection efficiency >95%
    Aerosol concentration Up to 104 partricles/cm3
    Condensing fluids Water, distilled or cleaner
    Wick material DVPP00010 Durapore Membrane Filter (Millipore) formed into a 30 cm long (6.35 mm OD × 4.8 mm ID) roll
    Inlet/Sample flow rate 1.0 L/min
    Sampled aerosol conditions Sampled aerosol conditions
    Sequential sampling onto SEM sample platen 5 mounting holes for SEM stubs (plus a home set up well), mounting plate made of PEEK polymer with Stainless Steel 304 bottom heating plugs. Other materials and configurations are possible.
    SEM stub dimensions Accepts round SEM stubs – 25.4 mm (1 inch) stub main diameter maximum, 3.2 mm mounting pin diameter maximum, 9 mm mounting pin length maximum
    Sequential sample time User-selectable timed-sample on each stub from 1 minute to 24 hours
    Dry deposition area Approximately 0.5 mm diam
    Communications USB communications output for sampling parameters and instrument status
    Environmental operating conditions 15 – 30°C, 10 – 95% RH
    Sample inlet 6 mm OD SS tube
    Power Universal 100 - 230 VAC 50/60 Hz, 140 W max
    Dimensions(W × D × H) 305 mm (12 in.) × 255 mm (10 in.) × 500 mm (19.5 in.)
    Weight Growth Tube Unit: 6.8 kg (15 lb), Sequential SEM Collector module: 1.1 kg (2.5 lb)

    ◆ Applications



    • UPW system contamination mapping
    • Filter retention testing
    • Component contamination profiling
        • Filter (MF and UF) shedding
        • IX resin release
        • Mechanical components (valves, regulator, tubing, etc.)
        • Membrane contactors
    • Particle measuring instrument to particle correlations