个体 VOCs

侦测范围

0 ~ 1000 ppb

侦测更低限制

≤ 1 ppb for Toluene in 30 min

VOCs清单 (target) *

依据客户规格有所增减

Acetone; IPA; Benzene; Toluene; Ethylbenzene; Styrene; m,p,o-xylene; Ethyl acetate;
Butyl ester; Hexane; 2-heptanone; 2-butanone; m,p,o-Ethylmethylbenzene;
Trimethylbenzene isomers; PGME**; PGMEA**"
* Additional VOC may be included based on customization needs.
** Calibration based on toluene

温度

侦测范围

-20℃ ~ 100℃ (sensor only)

解析度

0.1℃

湿度

侦测范围

0 ~ 100% (sensor only)

解析度

1%